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> 진공 게이지
> 진공 밸브 및 가스 주입 시스템
> 진공 컴포넌트
 
•  Electrical Feedthroughs
•  Fittings, Flanges, Feedthroughs
•  Heated Components
•  ISO-F Fixed Flange Components
•  ISO-K Clamp Flange Components
•  ISO-KF Small Flange Components
•  Liquid Feedthroughs
•  Lubricants and Sealing
•  Mechanical Feedthroughs
•  Rotary/Linear Motion Feedthroughs
•  UHV-CF Components
•  Vacuum Ball Bearings
•  Viewports Feedthroughs
   
> 통합 공정 감시
> FabGuard 통합 소프트웨어
> FabGuard를 이용한 RF 감지 기술



기계 피드스루
회전 피드스루 ISO-KF / ISO-K (FRH DN16 - DN63)
  • 높은 토크 전달용
  • FPM 샤프트 씨일 및 볼 베어링 포함

회전 피드스루 CF (FRU DN16 - DN40)
  • 벨로우(bellow)로 밀폐
  • 완전 금속 버전
  • 매우 까다로운 진공 요구사항 충족

회전/선형 운동 피드스루 ISO-KF (FCH DN16 - DN40)
  • 2개의 FPM 샤프트 씨일
  • 직접 밀기/당기기 회전 작동
  • 잠금 링 및 옵션 회전방지 장치 포함

선형 운동 피드스루 CF (FRU DN16 - DN40)
  • 더 높은 진공 요구사항에 대해서는 풀무(bellows) 포함
  • 직접 밀기/당기기 작동
  • 마이크로미터 나사를 이용한 고정밀 조정

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ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

   Datasheet - FCH DN16-DN40 (riba03e1.pdf)
English

   Datasheet - FPU DN16-DN40 CF (riba04e1.pdf)
English

   Datasheet - FRH DN16-DN63 ISO-KF/ISO-K (riba01e1.pdf)
English

   Datasheet - FRU DN16-DN40 CF (riba02e1_a.pdf)
English

Operations and Maintenance Manuals:

   Gebrauchsanleitung - FCH016-H (rina06d1.pdf)
English

   Gebrauchsanleitung - FCH025-H (rina07d1.pdf)
English

   Gebrauchsanleitung - FCH040-H (rina08d1.pdf)
English

   Gebrauchsanleitung - FPU016-H (rina10d1.pdf)
English

   Gebrauchsanleitung - FPU016-Z (rina14d1.pdf)
English

   Gebrauchsanleitung - FPU040-H (rina11d1.pdf)
English

   Gebrauchsanleitung - FPU040-Z (rina15d1-a.pdf)
English

   Gebrauchsanleitung - FRH016-H (rina02d1.pdf)
English

   Gebrauchsanleitung - FRH025-H (rina03d1.pdf)
English

   Gebrauchsanleitung - FRH040-H (rina04d1.pdf)
English

   Gebrauchsanleitung - FRH063-H (rina05d1.pdf)
English

   Gebrauchsanleitung - FRU016-H (rina12d1.pdf)
English

   Gebrauchsanleitung - FRU040-L (rina09d1.pdf)
English

   Gebrauchsanleitung - FRU040-N (rina13d1.pdf)
English

   Operating Manual - FCH016-H (rina06e1.pdf)
English

   Operating Manual - FCH025-H (rina07e1.pdf)
English

   Operating Manual - FCH040-H (rina08e1.pdf)
English

   Operating Manual - FPU016-H (rina10e1.pdf)
English

   Operating Manual - FPU016-Z (rina14e1.pdf)
English

   Operating Manual - FPU040-H (rina11e1.pdf)
English

   Operating Manual - FRH016-H (rina02e1.pdf)
English

   Operating Manual - FRH025-H (rina03e1.pdf)
English

   Operating Manual - FRH040-H (rina04e1.pdf)
English

   Operating Manual - FRU016-H (rina12e1.pdf)
English

   Operating Manual - FRU040-L (rina09e1.pdf)
English

   Operating Manual - FRU040-N (rina13e1.pdf)
English

   Operating manual - FPU040-Z (rina15e1_a.pdf)
English

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