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Custom Designed for Semiconductor Processes
INFICON heated exhaust lines are recommended for CVD, Etch, and other processes where exhaust line contamination occurs.
Condensed process-by-products on exhaust line walls reduce conductance and increase the potential of particulate contamination.
Heating exhaust lines to process temperature eliminates condensation, improving run-to-run repeatability of critical process control parameters. Other benefits include, reduced exposure to hazardous chemicals and extended preventive maintenance schedules.
Features at a Glance
- Modular assembly
- Custom configurations
- Excellent thermal performance
- Thermostatically controlled wall temperature
- Integral thermal protection
- LTA control circuit monitors individual heater performance
- Cool-to-the-touch, exterior surface
- Unique bonding process eliminates cold spots and improves thermal transfer for fast warm-up and extended heater life
- Lower energy consumption
- UL, SEMI S2 and CE marked
ASSOCIATED TECHNICAL INFORMATION
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Datasheet - Exhaust Line (siba10e1.pdf)
English
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